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Sono-Tek Corporation
2012 Route 9W
Milton, NY 12547 USA
phone: 1-845-795-2020
fax: 1-845-795-2720
email: info@sono-tek.com
www.sono-tek.com

Booth 8

Sono-Tek provides precision ultrasonic coating systems for photoresist onto MEMs wafers, using patented ultrasonic spray technology to deposit uniform thin films of photoresist onto difficult to coat deep well topographies with high aspect ratios. The soft velocity spray provides superior coverage over spin coating with repeatable performance. Sono-Tek's ExactaCoat system is a complete programmable photoresist spray solution.



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