IEEE MEMS 2014 Conference -- January 26-30, 2014 -- San Francisco, USA

Exhibition

Current Support

Booth Availability

Exhibition Schedule

Exhibitor Prospectus

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NANOPLAS
4 rue de Rochepleine
Saint-Égrève, 38521 FRANCE
phone: +33-626-55-0335
email: ypilloux@nanoplas.eu
www.nanoplas.eu

Booth 33

Nanoplas is a provider of innovative plasma-processing equipment for the semiconductor industry. The company's vision is to achieve a paradigm shift in plasma source design to enable manufacturing of next-generation MEMS. Nanoplas provides High-density radical flux (HDRF®) technology, which achieves a plasma density up to 1000 times greater than conventional plasma systems, enabling Dry Releases, Stripping, and Scallop Smoothing of the new MEMS generation at lower temperature for damage-free and high-efficiency cleaning.