IEEE MEMS 2014 Conference -- January 26-30, 2014 -- San Francisco, USA

Exhibition

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Muegge GmbH
Hochstrasse 4-6
Reichelsheim, 64385 GERMANY
phone: +49-6164-930711
fax: +49-6164-9307-93
email: info@muegge.de
www.muegge.de

Booth 34

MUEGGE GmbH is a top international supplier in the field of industrial microwave technology. Its portfolio includes microwave generators and components, including the corresponding power supply technology for various applications, such as industrial heating and plasma technology. The microwave systems produced by MUEGGE are used to generate plasma for industrial, semiconductor and flat panel applications. MUEGGE has acute expertise in Stripping/Removal tools, which enable a fast dry etch process for SU-8, KMPR and PMMA. This is a key process technology for MEMS fabrication.