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LPE was established in 1972. Along the years LPE has become the leader in the epitaxial reactor market for discrete devices for power applications worldwide. Since 2001 LPE has started several R&D projects devoted to the development of new reactors and new processes for Silicon and Silicon Carbide for power electronics, sensors and MEMS. The following LPE reactors are nowadays used for MEMS: Pe3061: 200mm and 150mm batch for epitaxial Silicon layer deposition; Pe1O6: 150mm and 100mm Single Wafer Reactor for epitaxial SiC deposition.
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