Program Advance Program Invited Speakers General Info Conference Officials Previous Conferences		Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years it has attracted over 600 participants and has presented more than 200 select papers in non-overlapping oral and poster sessions. The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009) will be held in Sorrento, Italy, from 25 - 29 January 2009. The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to: Design, simulation and analysis tools with experimental verification Fabrication technologies and processes Silicon and non-silicon materials Electro-mechanical integration techniques Assembly and packaging approaches Metrology and operational evaluation techniques System architecture The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to: Mechanical, thermal, and magnetic sensors and actuators, and system Opto-mechanical microdevices and microsystems Fluidic microcomponents and microsystems Microdevices for data storage Microdevices for biomedical engineering Micro chemical analysis systems Microdevices and systems for wireless communication Microdevices for power supply and energy harvesting Nano-electro-mechanical devices and systems Scientific microinstruments

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